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Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy

dc.contributor.authorGao, Weimin
dc.contributor.authorGlorieux, C.
dc.contributor.authorLauriks, W.
dc.contributor.authorThoen, J.
dc.date.accessioned2021-10-14T21:40:38Z
dc.date.available2021-10-14T21:40:38Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6345
dc.sourceIIOimport
dc.titleInvestigation of titanium nitride coating by broadband laser ultrasonic spectroscopy
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage132
dc.source.endpage138
dc.source.journalChinese Physics
dc.source.issue2
dc.source.volume11
imec.availabilityPublished - open access


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