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Add-on Cu/Silk (Tm) module for high Q inductors

dc.contributor.authorJenei, Snezana
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorMaex, Karen
dc.contributor.authorNauwelaers, Bart
dc.date.accessioned2021-10-14T21:54:50Z
dc.date.available2021-10-14T21:54:50Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6436
dc.sourceIIOimport
dc.titleAdd-on Cu/Silk (Tm) module for high Q inductors
dc.typeJournal article
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewno
dc.source.beginpage173
dc.source.endpage175
dc.source.journalIEEE Electron Device Letters
dc.source.issue4
dc.source.volume23
imec.availabilityPublished - imec


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