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Hydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone silicon

dc.contributor.authorJob, R.
dc.contributor.authorUlyashin, A. G.
dc.contributor.authorFahrner, W. R.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorTonelli, G.
dc.date.accessioned2021-10-14T21:55:41Z
dc.date.available2021-10-14T21:55:41Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6441
dc.sourceIIOimport
dc.titleHydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone silicon
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage116
dc.source.endpage120
dc.source.journalNuclear Instruments & Methods in Physics Research B
dc.source.issue1_4
dc.source.volume186
imec.availabilityPublished - imec


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