Low Weibull slope of breakdown distributions in high-K layers
dc.contributor.author | Kauerauf, Thomas | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Cartier, Eduard | |
dc.contributor.author | Soens, Charlotte | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-14T22:00:14Z | |
dc.date.available | 2021-10-14T22:00:14Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6468 | |
dc.source | IIOimport | |
dc.title | Low Weibull slope of breakdown distributions in high-K layers | |
dc.type | Journal article | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Soens, Charlotte | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.source.peerreview | no | |
dc.source.beginpage | 215 | |
dc.source.endpage | 217 | |
dc.source.journal | IEEE Electron Device Letters | |
dc.source.issue | 4 | |
dc.source.volume | 23 | |
imec.availability | Published - imec |
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