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Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide

dc.contributor.authorLauwers, Anne
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorChamirian, Oxana
dc.contributor.authorLindsay, Richard
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorVrancken, Christa
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:10:29Z
dc.date.available2021-10-14T22:10:29Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6528
dc.sourceIIOimport
dc.titleSilicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide
dc.typeJournal article
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage131
dc.source.endpage142
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume64
imec.availabilityPublished - imec
imec.internalnotesMAM2002; Vaals, The Netherlands, 3-6 March 2002


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