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Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions

dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorPuers, Bob
dc.contributor.authorBaert, Kris
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T22:41:28Z
dc.date.available2021-10-14T22:41:28Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6690
dc.sourceIIOimport
dc.titlePull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage458
dc.source.endpage464
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue4
dc.source.volume12
imec.availabilityPublished - imec


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