Defect assessment in advanced semiconductor materials and devices
| dc.contributor.author | Poyai, Amporn | |
| dc.date.accessioned | 2021-10-14T22:50:53Z | |
| dc.date.available | 2021-10-14T22:50:53Z | |
| dc.date.issued | 2002-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6736 | |
| dc.source | IIOimport | |
| dc.title | Defect assessment in advanced semiconductor materials and devices | |
| dc.type | PHD thesis | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | Claeys, Cor | |
| imec.availability | Published - open access |