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Plasticity of electromigration-induced hillocking and its effect on the critical length

dc.contributor.authorProost, Joris
dc.contributor.authorDelaey, L.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:52:59Z
dc.date.available2021-10-14T22:52:59Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6746
dc.sourceIIOimport
dc.titlePlasticity of electromigration-induced hillocking and its effect on the critical length
dc.typeJournal article
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage9108
dc.source.endpage9115
dc.source.journalJournal of Applied Physics
dc.source.issue11
dc.source.volume91
imec.availabilityPublished - imec


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