dc.contributor.author | Reybrouck, Mario | |
dc.contributor.author | Vangoidsenhoven, Diziana | |
dc.contributor.author | Maenhoudt, Mireille | |
dc.contributor.author | Van Aelst, Joke | |
dc.contributor.author | Boullart, Werner | |
dc.date.accessioned | 2021-10-14T22:54:56Z | |
dc.date.available | 2021-10-14T22:54:56Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6755 | |
dc.source | IIOimport | |
dc.title | Back-end, low-k dielectric compatible resist rework procedure | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Reybrouck, Mario | |
dc.contributor.imecauthor | Vangoidsenhoven, Diziana | |
dc.contributor.imecauthor | Van Aelst, Joke | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | no | |
dc.source.conference | 39th Interface Symposium | |
dc.source.conferencedate | 22/09/2002 | |
dc.source.conferencelocation | San Diego, CA USA | |
imec.availability | Published - imec | |