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Empfindliches schützen: Wie Sie mikromechanische Systeme schützen

dc.contributor.authorVan Bavel, Mieke
dc.date.accessioned2021-10-14T23:27:52Z
dc.date.available2021-10-14T23:27:52Z
dc.date.issued2002-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6907
dc.sourceIIOimport
dc.titleEmpfindliches schützen: Wie Sie mikromechanische Systeme schützen
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.source.peerreviewno
dc.source.beginpage48
dc.source.endpage50
dc.source.journalElektronik Journal
imec.availabilityPublished - imec


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