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PolySiGe uncooled microbolometers for thermal IR detection

dc.contributor.authorVan Hoof, Chris
dc.contributor.authorDe Moor, Piet
dc.date.accessioned2021-10-14T23:35:36Z
dc.date.available2021-10-14T23:35:36Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6942
dc.sourceIIOimport
dc.titlePolySiGe uncooled microbolometers for thermal IR detection
dc.typeBook chapter
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Moor, Piet
dc.source.peerreviewno
dc.source.beginpage449
dc.source.bookHandbook of Infrared Detection Technologies
dc.source.endpage477
imec.availabilityPublished - imec


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