On the formation of silicides on polyrunners with topography by a two-step silicidation process

dc.contributor.author	Jonckx, Franky
dc.contributor.author	Verbeeck, Rita
dc.contributor.author	Deweerdt, Bruno
dc.contributor.author	Maex, Karen
dc.date.accessioned	2021-09-29T13:08:06Z
dc.date.available	2021-09-29T13:08:06Z
dc.date.issued	1995
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/697
dc.source	IIOimport
dc.title	On the formation of silicides on polyrunners with topography by a two-step silicidation process
dc.type	Journal article
dc.contributor.imecauthor	Verbeeck, Rita
dc.contributor.imecauthor	Deweerdt, Bruno
dc.contributor.imecauthor	Maex, Karen
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	378
dc.source.endpage	381
dc.source.journal	Applied Surface Science
dc.source.volume	91
imec.availability	Published - open access
imec.internalnotes	Proceedings of the 1st European Workshop on Materials for Advanced Metallization. Radebeul, Germany, March 19-22, 1995.