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On the formation of silicides on polyrunners with topography by a two-step silicidation process
Publication:
On the formation of silicides on polyrunners with topography by a two-step silicidation process
Date
1995
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jonckx, Franky
;
Verbeeck, Rita
;
Deweerdt, Bruno
;
Maex, Karen
Journal
Applied Surface Science
Abstract
Description
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2118
since deposited on 2021-09-29
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Acq. date: 2025-12-07
Citations
Metrics
Views
2118
since deposited on 2021-09-29
3
last month
1
last week
Acq. date: 2025-12-07
Citations