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Failure analysis of microelectromechanical systems (MEMS)

dc.contributor.authorWalraven, J.A.
dc.contributor.authorWaterson, B.A.
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-14T23:59:31Z
dc.date.available2021-10-14T23:59:31Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7046
dc.sourceIIOimport
dc.titleFailure analysis of microelectromechanical systems (MEMS)
dc.typeBook chapter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage75
dc.source.bookMicroelectronic Failure Analysis. Desk Reference 2002 Supplement
dc.source.endpage97
imec.availabilityPublished - imec


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