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Reliable two-dimensional carrier profiling by scanning spreading resistance microscopy on InP-based devices with fast quantification procedure

dc.contributor.authorXu, Mingwei
dc.contributor.authorEyben, Pierre
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T00:05:28Z
dc.date.available2021-10-15T00:05:28Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7069
dc.sourceIIOimport
dc.titleReliable two-dimensional carrier profiling by scanning spreading resistance microscopy on InP-based devices with fast quantification procedure
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage1048
dc.source.endpage1054
dc.source.journalJapanese Journal of Applied Physics. Part 1
dc.source.issue2B
dc.source.volume41
imec.availabilityPublished - imec
imec.internalnotes


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