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CAD-oriented semi analytic approach for capacitance matrix computation of multilayer VLSI interconnects

dc.contributor.authorYmeri, Hasan
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T00:08:38Z
dc.date.available2021-10-15T00:08:38Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7082
dc.sourceIIOimport
dc.titleCAD-oriented semi analytic approach for capacitance matrix computation of multilayer VLSI interconnects
dc.typeJournal article
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage5
dc.source.journalInformacije Midem - Journal of Microelectronics Components and Materials
dc.source.issue1
dc.source.volume32
imec.availabilityPublished - imec


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