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Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips

dc.contributor.authorAlvarez, D.
dc.contributor.authorHartwich, J.
dc.contributor.authorFouchier, Marc
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T03:58:45Z
dc.date.available2021-10-15T03:58:45Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7131
dc.sourceIIOimport
dc.titleSub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1724
dc.source.endpage1726
dc.source.journalApplied Physics Letters
dc.source.issue11
dc.source.volume82
imec.availabilityPublished - open access


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