Show simple item record

Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices

dc.contributor.authorAlvarez, David
dc.contributor.authorHartwich, J.
dc.contributor.authorKretz, J.
dc.contributor.authorFouchier, Marc
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T03:58:47Z
dc.date.available2021-10-15T03:58:47Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7133
dc.sourceIIOimport
dc.titleScanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage945
dc.source.endpage950
dc.source.journalMicroelectronic Engineering
dc.source.volume67-68
imec.availabilityPublished - imec
imec.internalnotesPaper from the 28th Int. Conf. Micro- and Nano-Engineering; Sept. 2002; Lugano


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record