| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Wang, Qingfeng | |
| dc.contributor.author | Deweerdt, Bruno | |
| dc.contributor.author | Maex, Karen | |
| dc.date.accessioned | 2021-09-29T13:08:57Z | |
| dc.date.available | 2021-09-29T13:08:57Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/717 | |
| dc.source | IIOimport | |
| dc.title | Ti/Co bilayers in salicide technology: electrical evaluation | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Deweerdt, Bruno | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 12 | |
| dc.source.endpage | 18 | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 91 | |
| imec.availability | Published - open access | |
| imec.internalnotes | Proceedings of the 1st European Workshop on Materials for Advanced Metallization. Radebeul, Germany, March 19-22, 1995. | |
