dc.contributor.author | Brongersma, Sywert | |
dc.contributor.author | D'Haen, Jan | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | De Ceuninck, Ward | |
dc.contributor.author | Vervoort, Iwan | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T04:04:26Z | |
dc.date.available | 2021-10-15T04:04:26Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7261 | |
dc.source | IIOimport | |
dc.title | Copper deposition and subsequent grain structure evolution in narrow lines | |
dc.type | Journal article | |
dc.contributor.imecauthor | Brongersma, Sywert | |
dc.contributor.imecauthor | D'Haen, Jan | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | De Ceuninck, Ward | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 2485 | |
dc.source.endpage | 2490 | |
dc.source.journal | Materials Science Forum | |
dc.source.issue | 1_5 | |
dc.source.volume | 426-4 | |
imec.availability | Published - open access | |
imec.internalnotes | Thermec'2003 | |