Show simple item record

Thickness scaling issues of Ni-silicide

dc.contributor.authorChamirian, Oxana
dc.contributor.authorKittl, Jorge
dc.contributor.authorLauwers, Anne
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Dal, Mark
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:07:34Z
dc.date.available2021-10-15T04:07:34Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7301
dc.sourceIIOimport
dc.titleThickness scaling issues of Ni-silicide
dc.typeJournal article
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage201
dc.source.endpage208
dc.source.journalMicroelectronic Engineering
dc.source.issue2_4
dc.source.volume70
imec.availabilityPublished - imec
imec.internalnotesMaterials for Advanced Metallization 2003


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record