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Characterisation of JSR's spin-on hardmask FF-02

dc.contributor.authorDas, Arabinda
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorFurukawa, Yukiko
dc.contributor.authorNguyen Hoang, Viet
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorde Theije, Femke
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.contributor.authorIacopi, Francesca
dc.contributor.authorStucchi, Michele
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVos, Ingrid
dc.contributor.authorBender, Hugo
dc.contributor.authorPatz, M.
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:15:20Z
dc.date.available2021-10-15T04:15:20Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7379
dc.sourceIIOimport
dc.titleCharacterisation of JSR's spin-on hardmask FF-02
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewno
dc.source.beginpage308
dc.source.endpage313
dc.source.journalMicroelectronic Engineering
dc.source.issue2_4
dc.source.volume70
imec.availabilityPublished - imec
imec.internalnotesPaper from: European Workshop on Materials for Advanced Metallization, La Londe Les Maures, March 2003


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