Publication:

Characterisation of JSR's spin-on hardmask FF-02

Date

2003

Journal article

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Author(s)

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Furukawa, Yukiko

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Nguyen Hoang, Viet

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Terzieva, Valentina

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de Theije, Femke

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Whelan, Caroline

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Maenhoudt, Mireille

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Struyf, Herbert

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;

Iacopi, Francesca

;

Stucchi, Michele

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Carbonell, Laure

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;

;

;

;

Van Hove, Marleen

;

Journal

Microelectronic Engineering

Metrics

2049 since deposited on 2021-10-15

Acq. date: 2026-01-09