Publication:

Characterisation of JSR's spin-on hardmask FF-02

Date

2003

Journal article

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Author(s)

;

;

Furukawa, Yukiko

;

Nguyen Hoang, Viet

;

Terzieva, Valentina

;

de Theije, Femke

;

Whelan, Caroline

;

Maenhoudt, Mireille

;

Struyf, Herbert

;

;

Iacopi, Francesca

;

Stucchi, Michele

;

Carbonell, Laure

;

;

;

;

;

Van Hove, Marleen

;

Journal

Microelectronic Engineering

Statistics

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