Characterisation of JSR's spin-on hardmask FF-02

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Author(s)

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Furukawa, Yukiko

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Nguyen Hoang, Viet

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Terzieva, Valentina

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de Theije, Femke

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Whelan, Caroline

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Maenhoudt, Mireille

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Struyf, Herbert

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Iacopi, Francesca

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Stucchi, Michele

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Carbonell, Laure

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Van Hove, Marleen

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Journal

Microelectronic Engineering

Metrics

2046 since deposited on 2021-10-15

Acq. date: 2025-10-22