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Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, R.
dc.date.accessioned2021-10-15T04:24:46Z
dc.date.available2021-10-15T04:24:46Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7458
dc.sourceIIOimport
dc.titleIon-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage523
dc.source.endpage526
dc.source.journalApplied Surface Science
dc.source.volume203-204
imec.availabilityPublished - imec


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