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MEMS reliability

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T04:25:37Z
dc.date.available2021-10-15T04:25:37Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7465
dc.sourceIIOimport
dc.titleMEMS reliability
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage1047
dc.source.endpage1048
dc.source.journalMicroelectronics Reliability
dc.source.issue7
dc.source.volume43
imec.availabilityPublished - imec


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