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A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorMertens, Robert
dc.contributor.authorPuers, Robert
dc.date.accessioned2021-10-15T04:25:54Z
dc.date.available2021-10-15T04:25:54Z
dc.date.issued2003-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7467
dc.sourceIIOimport
dc.titleA low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage604
dc.source.endpage612
dc.source.journalJ. Micromechanics and Microengineering
dc.source.issue13
dc.source.volume13
imec.availabilityPublished - imec


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