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High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

dc.contributor.authorElmazria, O.
dc.contributor.authorMortet, V.
dc.contributor.authorEl Hakiki, M.
dc.contributor.authorNesladek, Milos
dc.contributor.authorAlnot, P.
dc.date.accessioned2021-10-15T04:38:13Z
dc.date.available2021-10-15T04:38:13Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7553
dc.sourceIIOimport
dc.titleHigh velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.source.peerreviewno
dc.source.beginpage710
dc.source.endpage715
dc.source.journalIEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control
dc.source.issue6
dc.source.volume50
imec.availabilityPublished - imec


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