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Combined atomic force microscope and acoustic wave devices: application to electrodeposition

dc.contributor.authorFriedt, Jean-Michel
dc.contributor.authorFrancis, Laurent
dc.contributor.authorChoi, Kang-Hoon
dc.contributor.authorFrederix, Filip
dc.contributor.authorCampitelli, Andrew
dc.date.accessioned2021-10-15T04:43:52Z
dc.date.available2021-10-15T04:43:52Z
dc.date.issued2003-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7589
dc.sourceIIOimport
dc.titleCombined atomic force microscope and acoustic wave devices: application to electrodeposition
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage1500
dc.source.endpage1505
dc.source.journalJ. Vacuum Science and Technology A
dc.source.issue4
dc.source.volume21
imec.availabilityPublished - imec


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