A fundamental study of the rinsing and drying step in semiconductor wet cleaning
| dc.contributor.author | Fyen, Wim | |
| dc.date.accessioned | 2021-10-15T04:44:19Z | |
| dc.date.available | 2021-10-15T04:44:19Z | |
| dc.date.issued | 2003-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7592 | |
| dc.source | IIOimport | |
| dc.title | A fundamental study of the rinsing and drying step in semiconductor wet cleaning | |
| dc.type | PHD thesis | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | De Keersmaecker, Roger | |
| imec.availability | Published - open access |