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On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS

dc.contributor.authorJanssens, Tom
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGildenpfennig, A.
dc.date.accessioned2021-10-15T05:00:47Z
dc.date.available2021-10-15T05:00:47Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7686
dc.sourceIIOimport
dc.titleOn the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS
dc.typeJournal article
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage30
dc.source.endpage34
dc.source.journalApplied Surface Science
dc.source.volume203-204
imec.availabilityPublished - open access


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