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Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology

dc.contributor.authorJohnson, J.
dc.contributor.authorGoux, Ludovic
dc.contributor.authorSchwitters, Michael
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, Concetta
dc.contributor.authorCasella, C.
dc.contributor.authorZambrano, R.
dc.contributor.authorVecchio, Emma
dc.contributor.authorMonchoix, Hervé
dc.contributor.authorVan Autryve, Luc
dc.contributor.authorLisoni, Judit
dc.date.accessioned2021-10-15T05:03:08Z
dc.date.available2021-10-15T05:03:08Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7699
dc.sourceIIOimport
dc.titleIntegration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
dc.typeOral presentation
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.conferenceConference of Surface Science and their Applications - CLACSA-11
dc.source.conferencedate7/12/2003
dc.source.conferencelocationPucon Chili
imec.availabilityPublished - imec


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