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Development of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube

dc.contributor.authorCho, Byung-Jin
dc.contributor.authorVandenabeele, Peter
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-29T12:40:07Z
dc.date.available2021-09-29T12:40:07Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/76
dc.sourceIIOimport
dc.titleDevelopment of a Hexagonal-Shaped Rapid Thermal Processor Using a Vertical Tube
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage345
dc.source.endpage353
dc.source.journalIEEE Trans. Semiconductor Manufacturing
dc.source.volume7
imec.availabilityPublished - imec


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