Show simple item record

Developing a conductive oxide barrier for ferroelectric integration

dc.contributor.authorJohnson, Jo
dc.contributor.authorLisoni, Judit
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T05:03:19Z
dc.date.available2021-10-15T05:03:19Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7700
dc.sourceIIOimport
dc.titleDeveloping a conductive oxide barrier for ferroelectric integration
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage377
dc.source.endpage383
dc.source.journalMicroelectronic Engineering
dc.source.issue2_4
dc.source.volume70
imec.availabilityPublished - imec
imec.internalnotesEuropean Workshop on Materials for Advanced Metallization; March 2003


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record