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CMOS integration results for the 90nm technology node

dc.contributor.authorJurczak, Gosia
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorDachs, Charles
dc.date.accessioned2021-10-15T05:05:40Z
dc.date.available2021-10-15T05:05:40Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7713
dc.sourceIIOimport
dc.titleCMOS integration results for the 90nm technology node
dc.typeJournal article
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Bavel, Mieke
dc.source.peerreviewno
dc.source.beginpage129
dc.source.endpage132
dc.source.journalSemiconductor Fabtech
dc.source.volume18
imec.availabilityPublished - imec


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