CMOS integration results for the 90nm technology node
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | Augendre, Emmanuel | |
dc.contributor.author | Van Bavel, Mieke | |
dc.contributor.author | Dachs, Charles | |
dc.date.accessioned | 2021-10-15T05:05:40Z | |
dc.date.available | 2021-10-15T05:05:40Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7713 | |
dc.source | IIOimport | |
dc.title | CMOS integration results for the 90nm technology node | |
dc.type | Journal article | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.imecauthor | Van Bavel, Mieke | |
dc.source.peerreview | no | |
dc.source.beginpage | 129 | |
dc.source.endpage | 132 | |
dc.source.journal | Semiconductor Fabtech | |
dc.source.volume | 18 | |
imec.availability | Published - imec |
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