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Materials issues of surfaces and interfaces in IC interconnections and contacts

dc.contributor.authorLi, Hua
dc.date.accessioned2021-10-15T05:23:17Z
dc.date.available2021-10-15T05:23:17Z
dc.date.issued2003-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7802
dc.sourceIIOimport
dc.titleMaterials issues of surfaces and interfaces in IC interconnections and contacts
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorMaex, Karen
dc.contributor.thesisadvisorFroyen, Ludo
imec.availabilityPublished - imec


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