Low dielectric constant materials for microelectronics
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | Iacopi, Francesca | |
dc.contributor.author | Brongersma, Sywert | |
dc.contributor.author | Yanovitskaya, Z.S. | |
dc.date.accessioned | 2021-10-15T05:32:12Z | |
dc.date.available | 2021-10-15T05:32:12Z | |
dc.date.issued | 2003-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7844 | |
dc.source | IIOimport | |
dc.title | Low dielectric constant materials for microelectronics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.imecauthor | Brongersma, Sywert | |
dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
dc.source.peerreview | no | |
dc.source.beginpage | 8793 | |
dc.source.endpage | 8841 | |
dc.source.journal | Journal of Applied Physics | |
dc.source.issue | 11 | |
dc.source.volume | 93 | |
imec.availability | Published - imec |
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