Why we need to rethink copper low-k reliability issues
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.date.accessioned | 2021-10-15T05:32:36Z | |
| dc.date.available | 2021-10-15T05:32:36Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7846 | |
| dc.source | IIOimport | |
| dc.title | Why we need to rethink copper low-k reliability issues | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 30 | |
| dc.source.journal | Solid State Technology | |
| dc.source.issue | 1 | |
| dc.source.volume | 46 | |
| imec.availability | Published - imec |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
|
There are no files associated with this item. |
|||