Show simple item record

Excimer laser microvia-technology in multichip modules

dc.contributor.authorManirambona, B.
dc.contributor.authorDe Baets, Johan
dc.contributor.authorVervaet, A.
dc.date.accessioned2021-10-15T05:34:49Z
dc.date.available2021-10-15T05:34:49Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7856
dc.sourceIIOimport
dc.titleExcimer laser microvia-technology in multichip modules
dc.typeJournal article
dc.contributor.imecauthorDe Baets, Johan
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage171
dc.source.endpage176
dc.source.journalApplied Surface Science
dc.source.volume208-209
imec.availabilityPublished - open access
imec.internalnotesPaper from E-MRS Spring Meeting Symposium D: Physics and Chemistry of Advanced Laser Materials Processing; June 2002; Strasbourg, France


Files in this item

Thumbnail
Name:
7348.pdf
Size:
523.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record