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Structural characterisations of AlN/diamond structures used for surface acoustic wave device applications

dc.contributor.authorMortet, V.
dc.contributor.authorElmazria, O.
dc.contributor.authorNesladek, Milos
dc.contributor.authorElhakiki, M.
dc.contributor.authorVanhoyland, G.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorAlnot, P.
dc.date.accessioned2021-10-15T05:47:20Z
dc.date.available2021-10-15T05:47:20Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7914
dc.sourceIIOimport
dc.titleStructural characterisations of AlN/diamond structures used for surface acoustic wave device applications
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.source.peerreviewno
dc.source.beginpage145
dc.source.endpage150
dc.source.journalPhysica Status Solidi A
dc.source.issue1
dc.source.volume199
imec.availabilityPublished - imec


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