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Flexible fabrication of microlenses in polymer layers with excimer laser ablation

dc.contributor.authorNaessens, Kris
dc.contributor.authorOttevaere, Heidi
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T05:49:00Z
dc.date.available2021-10-15T05:49:00Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7922
dc.sourceIIOimport
dc.titleFlexible fabrication of microlenses in polymer layers with excimer laser ablation
dc.typeJournal article
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage159
dc.source.endpage164
dc.source.journalApplied Surface Science
dc.source.volume208-209
imec.availabilityPublished - open access
imec.internalnotesPaper from E-MRS Spring Meeting Symposium D: Physics and Chemistry of Advanced Laser Materials Processing; June 2002; Strasbourg, France


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