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The perspectives of silicon-on-insulator technologies for cryogenic applications

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-09-29T12:40:09Z
dc.date.available2021-09-29T12:40:09Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/79
dc.sourceIIOimport
dc.titleThe perspectives of silicon-on-insulator technologies for cryogenic applications
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage2522
dc.source.endpage2532
dc.source.journalJournal of the Electrochemical Society
dc.source.issue9
dc.source.volume141
imec.availabilityPublished - imec


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