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Effect of N2 annealing on AlZrO oxide

dc.contributor.authorPetry, Jasmine
dc.contributor.authorRichard, Olivier
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorConard, Thierry
dc.contributor.authorChen, Jerry
dc.contributor.authorCosnier, Vincent
dc.date.accessioned2021-10-15T06:06:45Z
dc.date.available2021-10-15T06:06:45Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8001
dc.sourceIIOimport
dc.titleEffect of N2 annealing on AlZrO oxide
dc.typeJournal article
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage1482
dc.source.endpage1487
dc.source.journalJournal of Vacuum Science & Technology A
dc.source.issue4
dc.source.volume21
imec.availabilityPublished - imec


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