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Growth per cycle in atomic layer deposition: a theoretical model

dc.contributor.authorPuurunen, Riikka
dc.date.accessioned2021-10-15T06:16:02Z
dc.date.available2021-10-15T06:16:02Z
dc.date.issued2003-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8042
dc.sourceIIOimport
dc.titleGrowth per cycle in atomic layer deposition: a theoretical model
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage249
dc.source.endpage257
dc.source.journalChemical Vapor Deposition
dc.source.issue5
dc.source.volume9
imec.availabilityPublished - imec
imec.internalnotes


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