Growth per cycle in atomic layer deposition: real application examples of a theoretical model
| dc.contributor.author | Puurunen, Riikka | |
| dc.date.accessioned | 2021-10-15T06:16:14Z | |
| dc.date.available | 2021-10-15T06:16:14Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8043 | |
| dc.source | IIOimport | |
| dc.title | Growth per cycle in atomic layer deposition: real application examples of a theoretical model | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 333 | |
| dc.source.endpage | 337 | |
| dc.source.journal | Chemical Vapor Deposition | |
| dc.source.issue | 6 | |
| dc.source.volume | 9 | |
| imec.availability | Published - imec |
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