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Resist and process implementation issues in future processes for ULSI applications

dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-10-15T06:24:47Z
dc.date.available2021-10-15T06:24:47Z
dc.date.issued2003-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8080
dc.sourceIIOimport
dc.titleResist and process implementation issues in future processes for ULSI applications
dc.typeJournal article
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage300
dc.source.endpage305
dc.source.journalMicroelectronic Engineering
dc.source.volume67-68
imec.availabilityPublished - open access


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