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Pinhole density measurements of barriers deposited on low-k films

dc.contributor.authorShamiryan, Denis
dc.contributor.authorAbell, Thomas
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T06:36:25Z
dc.date.available2021-10-15T06:36:25Z
dc.date.issued2003-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8128
dc.sourceIIOimport
dc.titlePinhole density measurements of barriers deposited on low-k films
dc.typeJournal article
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewno
dc.source.beginpage341
dc.source.endpage345
dc.source.journalMicroelectronic Engineering
dc.source.issue2_4
dc.source.volume70
imec.availabilityPublished - imec


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