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Diffusion barrier integrity evaluation by ellipsometric ellipsometry

dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T06:36:39Z
dc.date.available2021-10-15T06:36:39Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8129
dc.sourceIIOimport
dc.titleDiffusion barrier integrity evaluation by ellipsometric ellipsometry
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage220
dc.source.endpage223
dc.source.journalJournal of Vacuum Science & Technology B
dc.source.issue1
dc.source.volume21
imec.availabilityPublished - imec


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