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Evaluation of thin Ta(N) film integrity deposited on porous glasses

dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorYanovitskaya, Z.S.
dc.contributor.authorZverev, A.V.
dc.contributor.authorTokei, Zsolt
dc.contributor.authorIacopi, Francesca
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T06:36:54Z
dc.date.available2021-10-15T06:36:54Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8130
dc.sourceIIOimport
dc.titleEvaluation of thin Ta(N) film integrity deposited on porous glasses
dc.typeJournal article
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage91
dc.source.endpage96
dc.source.journalOptica Applicata
dc.source.volume33
imec.availabilityPublished - imec


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