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Sustainable treatment of HF wastewaters from semiconductor industry with a fluidized bed reactor

dc.contributor.authorVan den Broeck, Kristel
dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorde Boer, Robert
dc.contributor.authorGiesen, Andreas
dc.contributor.authorWilms, Dirk
dc.date.accessioned2021-10-15T07:10:20Z
dc.date.available2021-10-15T07:10:20Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8260
dc.sourceIIOimport
dc.titleSustainable treatment of HF wastewaters from semiconductor industry with a fluidized bed reactor
dc.typeJournal article
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.source.peerreviewno
dc.source.beginpage423
dc.source.endpage428
dc.source.journalIEEE Trans. Semiconductor Manufacturing
dc.source.issue3
dc.source.volume16
imec.availabilityPublished - imec


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